マスクレスイオン注入(集束イオンビームを用いた微細加工技術(技術ノート))

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Material Type: 記事
Title: マスクレスイオン注入
Author/Editor: 橋本寿夫
Series Title: 集束イオンビームを用いた微細加工技術(技術ノート)
Author Heading: 橋本寿夫
Periodical title: 応用物理
No. or year of volume/issue: 56(8) 1987.08
Volume: 56
Issue: 8
Pages: p1073～1074
Publication date of volume/issue (W3CDTF): 1987-08
ISSN (Periodical Title): 0369-8009
ISSN-L (Periodical Title): 0369-8009
Publication (Periodical Title): 東京 : 応用物理学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM17
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-243
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3142776
http://id.ndl.go.jp/bib/3142776
Bibliographic Record Category (NDL): 632