プラズマ重合による有機薄膜 (身近になったCVD技術<特集>)
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- Material Type
- 記事
- Title
- Author/Editor
- 吉田 泰彦柏木 邦宏村山 洋一
- Series Title
- Periodical title
- 化學工業
- No. or year of volume/issue
- 38(10) 1987.10
- Volume
- 38
- Issue
- 10
- Pages
- p846～850,879