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イオンビームミキシング装置に取り付けた2次イオン質量分析装置(SIMS)について

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イオンビームミキシング装置に取り付けた2次イオン質量分析装置(SIMS)について

Call No. (NDL)
Z14-339
Bibliographic ID of National Diet Library
3143633
Material type
記事
Author
鷹野 一朗 他
Publisher
東京 : 工学院大学
Publication date
1987-04
Material Format
Paper
Journal name
工学院大学研究報告 = Research reports of Kogakuin University (通号 62) 1987.04
Publication Page
p.p139~143
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Paper

Material Type
記事
Author/Editor
鷹野 一朗 他
Author Heading
Periodical title
工学院大学研究報告 = Research reports of Kogakuin University
No. or year of volume/issue
(通号 62) 1987.04
Sequential issue number
62
Pages
p139~143
Publication date of volume/issue (W3CDTF)
1987-04
ISSN (Periodical Title)
0368-5098