炭化珪素のCVD・コーティング装置
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- Material Type
- 記事
- Title
- Author/Editor
- 平井 敏雄浅倉 寛行佐々木 真
- Periodical title
- 日本金属学会会報
- No. or year of volume/issue
- 26(8) 1987.08
- Volume
- 26
- Issue
- 8
- Pages
- p809～819
- Publication date of volume/issue (W3CDTF)
- 1987-08