簡易型非接触粗さ計の光学系に関する研究
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- Material Type
- 記事
- Title
- Author/Editor
- 粟野 陽一高瀬 省徳奈良 治郎
- Periodical title
- 技研所報
- No. or year of volume/issue
- 23(1) 1987.10
- Volume
- 23
- Issue
- 1
- Pages
- p23～32
- Publication date of volume/issue (W3CDTF)
- 1987-10