STM開発の現状と展望<特集>

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STM開発の現状と展望<特集>

Call No. (NDL)
Z16-466
Bibliographic ID of National Diet Library
3155191
Material type
記事
Author
-
Publisher
東京 : 精密工学会
Publication date
1987-12
Material Format
Paper
Journal name
精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編 53(12) 1987.12
Publication Page
p.p1811~1844
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Paper

Material Type
記事
Periodical title
精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
No. or year of volume/issue
53(12) 1987.12
Volume
53
Issue
12
Pages
p1811~1844
Publication date of volume/issue (W3CDTF)
1987-12
ISSN (Periodical Title)
0912-0289
ISSN-L (Periodical Title)
0912-0289