Volume number35(5)(125)
2次イオン質量分析法...

2次イオン質量分析法における低エネルギーイオン照射下2次イオン放出挙動に関する基礎的検討

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2次イオン質量分析法における低エネルギーイオン照射下2次イオン放出挙動に関する基礎的検討

Call No. (NDL)
Z17-213
Bibliographic ID of National Diet Library
3156117
Material type
記事
Author
小池 俊明 他
Publisher
東京 : 日本質量分析学会
Publication date
1987-10
Material Format
Digital
Journal name
質量分析 35(5) 1987.10
Publication Page
p.p226~230
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Detailed bibliographic record

Summary, etc.:

The sputtering behavior of secondary ion from copper surface against primary ion energy less than 3 keV has been studied. A remarked increase of relat...

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Digital

Material Type
記事
Author/Editor
小池 俊明 他
Author Heading
Periodical title
質量分析
No. or year of volume/issue
35(5) 1987.10
Volume
35
Issue
5
Pages
p226~230
Publication date of volume/issue (W3CDTF)
1987-10