蒸着銅薄膜におけるPPSフィルム基板のプラズマ処理効果
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- Material Type
- 記事
- Author/Editor
- 野坂 俊紀 他
- Author Heading
- Periodical title
- 大阪府立工業技術研究所報告 / 大阪府立工業技術研究所 編
- No. or year of volume/issue
- (通号 91) 1987.09
- Sequential issue number
- 91
- Pages
- p28～32
- Publication date of volume/issue (W3CDTF)
- 1987-09
- ISSN (Periodical Title)
- 0285-5267