硬質炭素薄膜の形成と応用(広がるプラズマの新しい応用--プラズマ・プロセスー6-)

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Material Type: 記事
Title: 硬質炭素薄膜の形成と応用
Author/Editor: 菅井秀郎
Series Title: 広がるプラズマの新しい応用--プラズマ・プロセスー6-
Author Heading: 菅井秀郎
Periodical title: 核融合研究 : プラズマ・核融合学会誌 / プラズマ・核融合学会編
No. or year of volume/issue: 57(6) 1987.06
Volume: 57
Issue: 6
Pages: p412～419
Publication date of volume/issue (W3CDTF): 1987-06
ISSN (Periodical Title): 0451-2375
ISSN-L (Periodical Title): 0451-2375
Publication (Periodical Title): 名古屋 : プラズマ・核融合学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM35
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-8
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3157999
http://id.ndl.go.jp/bib/3157999
Bibliographic Record Category (NDL): 632