プラズマCVD法による炭化けい素皮膜の生成
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- Material Type
- 記事
- Author/Editor
- 黒沢 和芳 他
- Author Heading
- Periodical title
- 愛知県工業技術センター報告 / 愛知県工業技術センター 編
- No. or year of volume/issue
- (通号 23) 1987.11
- Sequential issue number
- 23
- Pages
- p123～125
- Publication date of volume/issue (W3CDTF)
- 1987-11
- ISSN (Periodical Title)
- 0286-262X