マイクロ波プラズマCVD法によるSi基板上へのダイヤモンド薄膜の形成

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Material Type: 記事
Title: マイクロ波プラズマCVD法によるSi基板上へのダイヤモンド薄膜の形成
Author/Editor: 陳家富
黄燕清
細見暁
Author Heading: 陳家富
黄燕清
細見暁
Periodical title: 金属表面技術 / 金属表面技術協会 [編]
No. or year of volume/issue: 39(8) 1988.08
Volume: 39
Issue: 8
Pages: p434～439
Publication date of volume/issue (W3CDTF): 1988-08
ISSN (Periodical Title): 0026-0614
ISSN-L (Periodical Title): 0026-0614
Publication (Periodical Title): 東京 : 金属表面技術協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP41
Target Audience: 一般
Article Type: 記事分類: 電気工学--電子工学--電子部品--固体素子
Holding library: 国立国会図書館
Call No.: Z17-291
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3194158
http://id.ndl.go.jp/bib/3194158
Bibliographic Record Category (NDL): 632