薄膜の内部応力の推定法と発生原因

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Material Type: 記事
Title: 薄膜の内部応力の推定法と発生原因
Author/Editor: 馬来国弼
Author Heading: 馬来国弼
Periodical title: 応用物理
No. or year of volume/issue: 57(12) 1988.12
Volume: 57
Issue: 12
Pages: p1856～1867
Publication date of volume/issue (W3CDTF): 1988-12
ISSN (Periodical Title): 0369-8009
ISSN-L (Periodical Title): 0369-8009
Publication (Periodical Title): 東京 : 応用物理学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM17
Target Audience: 一般
Article Type: 記事分類: 物理学--分子・物性
Holding library: 国立国会図書館
Call No.: Z15-243
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3203392
http://id.ndl.go.jp/bib/3203392
Bibliographic Record Category (NDL): 632