X線マスク吸収体用スパッタW膜の応力制御とその膜特性

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X線マスク吸収体用スパッタW膜の応力制御とその膜特性

Call No. (NDL)
Z16-1852
Bibliographic ID of National Diet Library
3256822
Material type
記事
Author
二河 秀夫ほか
Publisher
東京 : 電子情報通信学会エレクトロニクス ソサイエティ
Publication date
1989-11
Material Format
Paper
Journal name
電子情報通信学会論文誌. C-2, エレクトロニクス. 2, 電子素子・応用 = The Transactions of the Institute of Electronics, Information and Communication Engineers. C-2 / 電子情報通信学会 編 72(11) 1989.11
Publication Page
p.p981~987
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Paper

Material Type
記事
Author/Editor
二河 秀夫
日高 義晴
戸所 義博
Periodical title
電子情報通信学会論文誌. C-2, エレクトロニクス. 2, 電子素子・応用 = The Transactions of the Institute of Electronics, Information and Communication Engineers. C-2 / 電子情報通信学会 編
No. or year of volume/issue
72(11) 1989.11
Volume
72
Issue
11
Pages
p981~987
Publication date of volume/issue (W3CDTF)
1989-11