Cu-Zr合金のSi...

Cu-Zr合金のSi-LSI配線材料への適応

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Cu-Zr合金のSi-LSI配線材料への適応

Call No. (NDL)
Z22-181
Bibliographic ID of National Diet Library
3598447
Material type
記事
Author
坂口 直志ほか
Publisher
釧路 : 釧路工業高等専門学校
Publication date
1994-12
Material Format
Paper
Journal name
釧路工業高等専門学校紀要 = Research reports Kushiro National College of Technology / 釧路工業高等専門学校 編 (通号 28) 1994.12
Publication Page
p.p57~60
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Paper

Material Type
記事
Author/Editor
坂口 直志
東藤 勇
Periodical title
釧路工業高等専門学校紀要 = Research reports Kushiro National College of Technology / 釧路工業高等専門学校 編
No. or year of volume/issue
(通号 28) 1994.12
Sequential issue number
28
Pages
p57~60
Publication date of volume/issue (W3CDTF)
1994-12
ISSN (Periodical Title)
0455-017X