高周波プラズマスパッタ型負重イオン源における気体材料の負イオン生成(第35回真空に関する連合講演会プロシーディングス)

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Material Type: 記事
Title: 高周波プラズマスパッタ型負重イオン源における気体材料の負イオン生成
Author/Editor: 辻博司他
Series Title: 第35回真空に関する連合講演会プロシーディングス
Author Heading: 辻博司
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 38(3) 1995.03
Volume: 38
Issue: 3
Pages: p218～220
Publication date of volume/issue (W3CDTF): 1995-03
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3612169
http://id.ndl.go.jp/bib/3612169
Bibliographic Record Category (NDL): 632