高周波スパッタ蒸着法による多結晶Siの低温成膜に関する研究-1-

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 61(6) 1995.06

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Digital
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 記事
Title: 高周波スパッタ蒸着法による多結晶Siの低温成膜に関する研究-1-
Author/Editor: 垣内弘章他
Author Heading: 垣内弘章
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 61(6) 1995.06
Volume: 61
Issue: 6
Pages: p829～833
Publication date of volume/issue (W3CDTF): 1995-06
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN12
Target Audience: 一般
Article Type: 記事分類: 電気工学--電子工学--電子部品--固体素子
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3613421
http://id.ndl.go.jp/bib/3613421
Bibliographic Record Category (NDL): 632