研削によるマイクロ形状創成 (3次元微細形状創成技術<特集>)

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研削によるマイクロ形状創成(3次元微細形状創成技術<特集>)

Call No. (NDL)
Z16-466
Bibliographic ID of National Diet Library
3638106
Material type
記事
Author
和井田 徹ほか
Publisher
東京 : 精密工学会
Publication date
1995-10
Material Format
Paper
Journal name
精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編 61(10) 1995.10
Publication Page
p.p1365~1368
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Paper Digital

Material Type
記事
Author/Editor
和井田 徹
岡野 啓作
Periodical title
精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
No. or year of volume/issue
61(10) 1995.10
Volume
61
Issue
10
Pages
p1365~1368