シリコン基板の熱酸化機構

Journal name: 日本金属学会誌 = The journal of the Japan Institute of Metals and Materials 54(1) 1990.01

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Material Type: 記事
Title: シリコン基板の熱酸化機構
Author/Editor: 須佐匡裕
永田和宏
後藤和弘
Author Heading: 須佐匡裕
永田和宏
後藤和弘
Periodical title: 日本金属学会誌 = The journal of the Japan Institute of Metals and Materials
No. or year of volume/issue: 54(1) 1990.01
Volume: 54
Issue: 1
Pages: p33～40
Publication date of volume/issue (W3CDTF): 1990-01
ISSN (Periodical Title): 0021-4876
ISSN-L (Periodical Title): 0021-4876
Publication (Periodical Title): 仙台 : 日本金属学会 ; 1937-
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP41
Target Audience: 一般
Article Type: 記事分類: 電気工学--電子工学--電子部品--固体素子 ; 化学・化学工業--無機化学・無機化学工業--非金属元素・非金属化合物
Holding library: 国立国会図書館
Call No.: Z17-314
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3652550
http://id.ndl.go.jp/bib/3652550
Bibliographic Record Category (NDL): 632