光スキッド法による超精密面の形状評価
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- Material Type
- 記事
- Title
- Author/Editor
- 安達 正明
- Author Heading
- Periodical title
- 光技術コンタクト = Optical and electro-optical engineering contact
- No. or year of volume/issue
- 28(5) 1990.05
- Volume
- 28
- Issue
- 5
- Pages
- p280～289
- Publication date of volume/issue (W3CDTF)
- 1990-05