Ti基板上に蒸着したNb膜上へのTi薄膜の析出とそのゲッターポンプ作用(第30回真空に関する連合講演会プロシーディングス)

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Material Type: 記事
Title: Ti基板上に蒸着したNb膜上へのTi薄膜の析出とそのゲッターポンプ作用
Author/Editor: 吉武道子
吉原一紘
Series Title: 第30回真空に関する連合講演会プロシーディングス
Author Heading: 吉武道子
吉原一紘
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 33(3) 1990.03
Volume: 33
Issue: 3
Pages: p198～200
Publication date of volume/issue (W3CDTF): 1990-03
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3664880
http://id.ndl.go.jp/bib/3664880
Bibliographic Record Category (NDL): 632