X線回折によるスパッ...

X線回折によるスパッタ膜の3次元応力測定についての一考察

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X線回折によるスパッタ膜の3次元応力測定についての一考察

Call No. (NDL)
Z22-1248
Bibliographic ID of National Diet Library
3675710
Material type
記事
Author
金子 忠夫ほか
Publisher
前橋 : 群馬工業高等専門学校
Publication date
1989
Material Format
Paper
Journal name
群馬高専レビュー = The Gunma-Kohsen review / 群馬工業高等専門学校教育研究委員会 編 (通号 8) 1989
Publication Page
p.p5~9
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Paper

Material Type
記事
Author/Editor
金子 忠夫
入戸野 修
Periodical title
群馬高専レビュー = The Gunma-Kohsen review / 群馬工業高等専門学校教育研究委員会 編
No. or year of volume/issue
(通号 8) 1989
Sequential issue number
8
Pages
p5~9
Publication date of volume/issue (W3CDTF)
1989
ISSN (Periodical Title)
0288-6936