モノシランのグロー放電分解によるa-Si:Hの成長表面への可視光の照射効果
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- Material Type
- 記事
- Author/Editor
- 山中 光之林 豊坂田 功
- Periodical title
- 電子技術総合研究所彙報 / 電子技術総合研究所 編
- No. or year of volume/issue
- 54(6) 1990.06
- Volume
- 54
- Issue
- 6
- Pages
- p623～629
- Publication date of volume/issue (W3CDTF)
- 1990-06