Co-sputter法によるAl及びB添加a-SiC:H薄膜の電気的特性

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Material Type: 記事
Title: Co-sputter法によるAl及びB添加a-SiC:H薄膜の電気的特性
Author/Editor: 富岡雄吾他
Author Heading: 富岡雄吾
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 33(9) 1990.09
Volume: 33
Issue: 9
Pages: p733～737
Publication date of volume/issue (W3CDTF): 1990-09
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Article Type: 記事分類: 電気工学--電気材料・部品
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3690976
http://id.ndl.go.jp/bib/3690976
Bibliographic Record Category (NDL): 632