円形回折格子のレーザ回折光を用いた基準位置検出法

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 57(2) 1991.02

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Material Type: 記事
Title: 円形回折格子のレーザ回折光を用いた基準位置検出法
Author/Editor: 伊藤昌文他
Author Heading: 伊藤昌文
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 57(2) 1991.02
Volume: 57
Issue: 2
Pages: p280～285
Publication date of volume/issue (W3CDTF): 1991-02
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN12
Target Audience: 一般
Article Type: 記事分類: 制御工学
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3698855
http://id.ndl.go.jp/bib/3698855
Bibliographic Record Category (NDL): 632