蛍光X線によるAL膜厚測定

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Material Type: 記事
Title: 蛍光X線によるAL膜厚測定
Author/Editor: 誉田忠義他
Author Heading: 誉田忠義
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 33(12) 1990.12
Volume: 33
Issue: 12
Pages: p922～927
Publication date of volume/issue (W3CDTF): 1990-12
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Article Type: 記事分類: 電気工学--電子工学--電子部品
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3704209
http://id.ndl.go.jp/bib/3704209
Bibliographic Record Category (NDL): 632