位相シフト干渉法による非接触表面粗さ測定--(米)WYKO社製TOPO表面粗さ計 (オプトメカトロニクス時代の超精密切削技術 ; 超精密切削面測定装置(付属資料))
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- Material Type
- 記事
- Author/Editor
- 深江 秀和
- Series Title
- Author Heading
- Periodical title
- 光技術コンタクト = Optical and electro-optical engineering contact
- No. or year of volume/issue
- (通号 臨時増刊) 1991.09
- Sequential issue number
- 臨時増刊
- Pages
- p299～307
- Publication date of volume/issue (W3CDTF)
- 1991-09