3-5族化合物半導体材料の表面精密加工技術--原子層エピタキシー(原子層単位で制御される物質合成<特集>)

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Material Type: 記事
Title: 3-5族化合物半導体材料の表面精密加工技術--原子層エピタキシー
Author/Editor: 目黒多加志
青柳克信
Series Title: 原子層単位で制御される物質合成<特集>
Author Heading: 目黒多加志
青柳克信
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 36(2) 1993.02
Volume: 36
Issue: 2
Pages: p73～80
Publication date of volume/issue (W3CDTF): 1993-02
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3808469
http://id.ndl.go.jp/bib/3808469
Bibliographic Record Category (NDL): 632