熱CVD法によるIn...

熱CVD法によるInP基板上へのSiNx膜形成

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熱CVD法によるInP基板上へのSiNx膜形成

Call No. (NDL)
Z14-426
Bibliographic ID of National Diet Library
3808920
Material type
記事
Author
植草 新一郎ほか
Publisher
川崎 : 明治大学科学技術研究所
Publication date
1990
Material Format
Paper
Journal name
明治大学科学技術研究所紀要 = Memoirs of the Institute of Science and Technology, Meiji University 29(3) 1990
Publication Page
p.p15~31
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Paper

Material Type
記事
Author/Editor
植草 新一郎
水野 善允
Periodical title
明治大学科学技術研究所紀要 = Memoirs of the Institute of Science and Technology, Meiji University
No. or year of volume/issue
29(3) 1990
Volume
29
Issue
3
Pages
p15~31
Publication date of volume/issue (W3CDTF)
1990