メタンーモノシラン混合ガス系におけるACプラズマの発光分光分析

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Material Type: 記事
Title: メタンーモノシラン混合ガス系におけるACプラズマの発光分光分析
Author/Editor: 清水秀己
Author Heading: 清水秀己
Periodical title: 愛知教育大学研究報告. 芸術・保健体育・家政・技術科学
No. or year of volume/issue: (通号 42) 1993.02
Sequential issue number: 42
Pages: p83～90
Publication date of volume/issue (W3CDTF): 1993-02
ISSN (Periodical Title): 0388-7367
ISSN-L (Periodical Title): 0388-7367
Publication (Periodical Title): 刈谷 : 愛知教育大学
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZV1
Target Audience: 一般
Article Type: 記事分類: 化学・化学工業--無機化学・無機化学工業--非金属元素・非金属化合物--セラミックス
Holding library: 国立国会図書館
Call No.: Z22-812
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3810607
http://id.ndl.go.jp/bib/3810607
Bibliographic Record Category (NDL): 632