スパッタリング生成によるAlN膜の残留応力の基板および基板温度依存性(X線材料強度<特集>)

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Material Type: 記事
Title: スパッタリング生成によるAlN膜の残留応力の基板および基板温度依存性
Author/Editor: 英崇夫他
Series Title: X線材料強度<特集>
Author Heading: 英崇夫
Periodical title: 材料 / 日本材料学会 [編]
No. or year of volume/issue: 42(477) 1993.06
Volume: 42
Issue: 477
Pages: p627～633
Publication date of volume/issue (W3CDTF): 1993-06
ISSN (Periodical Title): 0514-5163
ISSN-L (Periodical Title): 0514-5163
Publication (Periodical Title): 京都 : 日本材料学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM16
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-267
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3818613
http://id.ndl.go.jp/bib/3818613
Bibliographic Record Category (NDL): 632