弗素化したTextured SnO2薄膜の水素プラズマ耐性(第33回真空に関する連合講演会プロシーディングス)

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Material Type: 記事
Title: 弗素化したTextured SnO2薄膜の水素プラズマ耐性
Author/Editor: 川畑敬志他
Series Title: 第33回真空に関する連合講演会プロシーディングス
Author Heading: 川畑敬志
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 36(3) 1993.03
Volume: 36
Issue: 3
Pages: p275～277
Publication date of volume/issue (W3CDTF): 1993-03
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3822747
http://id.ndl.go.jp/bib/3822747
Bibliographic Record Category (NDL): 632