オゾンを利用したホット粒子の発生と酸化物薄膜形成への応用 (活性粒子による新表層材料創製の研究<特集>)
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- Material Type
- 記事
- Author/Editor
- 一村 信吾細川 俊介清水 肇
- Series Title
- Periodical title
- 電子技術総合研究所彙報 / 電子技術総合研究所 編
- No. or year of volume/issue
- 57(4) 1993.04
- Volume
- 57
- Issue
- 4
- Pages
- p300～313