MOCVD原料としての高純度〔Ti(dpm)2(i-C3H7O)2〕の合成

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MOCVD原料としての高純度〔Ti(dpm)2(i-C3H7O)2〕の合成

Call No. (NDL)
Z17-659
Bibliographic ID of National Diet Library
3825335
Material type
記事
Author
小林 一三
Publisher
東京 : 日本化学会
Publication date
1993-04
Material Format
Paper
Journal name
日本化学会誌 : 化学と工業化学 / 日本化学会 編 1993(4) 1993.04
Publication Page
p.p404~407
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Paper

Material Type
記事
Author/Editor
小林 一三
Author Heading
Periodical title
日本化学会誌 : 化学と工業化学 / 日本化学会 編
No. or year of volume/issue
1993(4) 1993.04
Volume
1993
Issue
4
Pages
p404~407
Publication date of volume/issue (W3CDTF)
1993-04