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分光エリプソメトリーによる化合物半導体の光学特性評価

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分光エリプソメトリーによる化合物半導体の光学特性評価

Call No. (NDL)
Z15-243
Bibliographic ID of National Diet Library
3847650
Material type
記事
Author
安達 定雄
Publisher
東京 : 応用物理学会
Publication date
1993-12
Material Format
Paper
Journal name
応用物理 62(12) 1993.12
Publication Page
p.p1197~1203
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Detailed bibliographic record

Summary, etc.:

記事分類: 物理学--分子・物性--光物性(Provided by: CiNii Research)

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Paper

Material Type
記事
Author/Editor
安達 定雄
Author Heading
Periodical title
応用物理
No. or year of volume/issue
62(12) 1993.12
Volume
62
Issue
12
Pages
p1197~1203
Publication date of volume/issue (W3CDTF)
1993-12