Preparation and Properties of Piezoelectric Lead Zirconate Titanate Thin Films for Microsensors and Microactuators by Sol-Gel Processing

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Preparation and Properties of Piezoelectric Lead Zirconate Titanate Thin Films for Microsensors and Microactuators by Sol-Gel Processing

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Material Type: 記事
Title: Preparation and Properties of Piezoelectric Lead Zirconate Titanate Thin Films for Microsensors and Microactuators by Sol-Gel Processing
Author/Editor: 土屋智由
伊藤寿浩
佐々木元他
Author Heading: 土屋智由
伊藤寿浩
佐々木元
Alternative Title: ゾルーゲル法によるマイクロセンサー,マイクロアクチュエーター用圧電体チタン酸ジルコン酸鉛セラミックス薄膜の作製とその特性
Periodical title: 日本セラミックス協会学術論文誌 / 日本セラミックス協会 [編]
No. or year of volume/issue: 104(1207) 1996.03
Volume: 104
Issue: 1207
Pages: 159～163
Publication date of volume/issue (W3CDTF): 1996-03
ISSN (Periodical Title): 0914-5400
ISSN-L (Periodical Title): 0914-5400
Publication (Periodical Title): 東京 : 日本セラミックス協会
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZP9
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-249
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3936657
http://id.ndl.go.jp/bib/3936657
Bibliographic Record Category (NDL): 632