シリコン酸化膜中の点欠陥の新しい検出法

Journal name: 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials 116(5) 1996.04

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Material Type: 記事
Title: シリコン酸化膜中の点欠陥の新しい検出法
Author/Editor: 大木義路
石井啓介
薛光洙他
Author Heading: 大木義路
石井啓介
薛光洙
Periodical title: 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
No. or year of volume/issue: 116(5) 1996.04
Volume: 116
Issue: 5
Pages: 387～391
Publication date of volume/issue (W3CDTF): 1996-04
ISSN (Periodical Title): 0385-4205
ISSN-L (Periodical Title): 0385-4205
Publication (Periodical Title): 東京 : 電気学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN31
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-793
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3954345
http://id.ndl.go.jp/bib/3954345
Bibliographic Record Category (NDL): 632