フッ素系ガスによる薄膜堆積装置のクリーニング

Journal name: 表面技術 = Journal of the Surface Finishing Society of Japan 47(6) 1996.06

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Material Type: 記事
Title: フッ素系ガスによる薄膜堆積装置のクリーニング
Author/Editor: 毛利勇
藤井正
小林義幸他
Author Heading: 毛利勇
藤井正
小林義幸
Periodical title: 表面技術 = Journal of the Surface Finishing Society of Japan
No. or year of volume/issue: 47(6) 1996.06
Volume: 47
Issue: 6
Pages: 493～497
Publication date of volume/issue (W3CDTF): 1996-06
ISSN (Periodical Title): 0915-1869
ISSN-L (Periodical Title): 0915-1869
Publication (Periodical Title): 東京 : 表面技術協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP41
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-291
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3976390
http://id.ndl.go.jp/bib/3976390
Bibliographic Record Category (NDL): 632