摩擦駆動を応用した光ディスク原盤露光装置用テーブル送り機構の開発

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 62(10) 1996.10

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Material Type: 記事
Title: 摩擦駆動を応用した光ディスク原盤露光装置用テーブル送り機構の開発
Author/Editor: 佐久田茂
足立幹雄
小川潔他
Author Heading: 佐久田茂
足立幹雄
小川潔
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 62(10) 1996.10
Volume: 62
Issue: 10
Pages: 1444～1448
Publication date of volume/issue (W3CDTF): 1996-10
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4046360
http://id.ndl.go.jp/bib/4046360
Bibliographic Record Category (NDL): 632