Synthesis of AlN Thin Films on Sapphire Substrates by Chemical Vapor Deposition of AlCl3-NH3 System and Surface Acoustic Wave Properties

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Synthesis of AlN Thin Films on Sapphire Substrates by Chemical Vapor Deposition of AlCl3-NH3 System and Surface Acoustic Wave Properties

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 4059668

Material type: 記事

Author: Kiyoshi Kayaほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 1996-05

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 35(5A) 1996.05

Publication Page: p.2782～2787

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Detailed bibliographic record

Summary, etc.：: Thin films of AlN were prepared on (012) sapphire substrates by chemical vapor deposition using AlCl3, NH3, H2 and N<...

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Material Type: 記事
Title: Synthesis of AlN Thin Films on Sapphire Substrates by Chemical Vapor Deposition of AlCl3-NH3 System and Surface Acoustic Wave Properties
Author/Editor: Kiyoshi Kaya
Yasuhito Kanno
Hiroshi Takahashi 他
Author Heading: Kiyoshi Kaya
Yasuhito Kanno
Hiroshi Takahashi
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 35(5A) 1996.05
Volume: 35
Issue: 5A
Pages: 2782～2787
Publication date of volume/issue (W3CDTF): 1996-05
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11196176
https://dl.ndl.go.jp/pid/11196176
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4059668
http://id.ndl.go.jp/bib/4059668
Bibliographic Record Category (NDL): 632