Applications of Aluminium Nitride Films Deposited by Reactive Sputtering to Silicon-On-Insulator Materials

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Applications of Aluminium Nitride Films Deposited by Reactive Sputtering to Silicon-On-Insulator Materials

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 4060012

Material type: 記事

Author: Stefan Bengtssonほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 1996-08

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 35(8) 1996.08

Publication Page: p.4175～4181

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Summary, etc.：: Self-heating effects in silicon-on-insulator (SOI) devices limit the applicability of SOI materials in electronics in cases where high power dissipati...

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Material Type: 記事
Title: Applications of Aluminium Nitride Films Deposited by Reactive Sputtering to Silicon-On-Insulator Materials
Author/Editor: Stefan Bengtsson
Mats Bergh
Manolis Choumas 他
Author Heading: Stefan Bengtsson
Mats Bergh
Manolis Choumas
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 35(8) 1996.08
Volume: 35
Issue: 8
Pages: 4175～4181
Publication date of volume/issue (W3CDTF): 1996-08
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11196181
https://dl.ndl.go.jp/pid/11196181
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4060012
http://id.ndl.go.jp/bib/4060012
Bibliographic Record Category (NDL): 632