Influences of Cu and Fe Impurities on Oxygen Precipitation in Czochralski-Grown Silicon
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- Material Type
- 記事
- Author/Editor
- Bo ShenJaroslaw JablonskiTakashi Sekiguchi 他
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 35(8) 1996.08
- Volume
- 35
- Issue
- 8
- Pages
- 4187～4194
- Publication date of volume/issue (W3CDTF)
- 1996-08