高周波スパッタ蒸着法による多結晶Siの低温成膜に関する研究(第2報)Si薄膜の構造および電気・光学特性

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 63(2) 1997.02

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Material Type: 記事
Title: 高周波スパッタ蒸着法による多結晶Siの低温成膜に関する研究(第2報)Si薄膜の構造および電気・光学特性
Author/Editor: 垣内弘章
芳井熊安
安武潔他
Author Heading: 垣内弘章
芳井熊安
安武潔
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 63(2) 1997.02
Volume: 63
Issue: 2
Pages: 233～237
Publication date of volume/issue (W3CDTF): 1997-02
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4139171
http://id.ndl.go.jp/bib/4139171
Bibliographic Record Category (NDL): 632