半導体実装におけるAu/Al接合信頼性に及ぼすAl表面自然酸化膜の影響
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- Material Type
- 記事
- Author/Editor
- 柘植 敦子水野 薫宇野 智裕 他
- Periodical title
- 新日鉄技報 / 新日本製鐡株式会社技術開発本部, 技術開発企画部 編
- No. or year of volume/issue
- (通号 362) 1997.02
- Sequential issue number
- 362
- Pages
- 77～82
- Publication date of volume/issue (W3CDTF)
- 1997-02
- ISSN (Periodical Title)
- 0916-7609