大口径ウェーハ(12インチ)超精密研削盤の開発 (特集先端砥粒加工:研削)

大口径ウェーハ(12インチ)超精密研削盤の開発

(特集先端砥粒加工:研削)

Journal name: Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 41(3) 1997.03

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Material Type: 記事
Title: 大口径ウェーハ(12インチ)超精密研削盤の開発
Author/Editor: 小林一雄
Series Title: 特集先端砥粒加工:研削
Author Heading: 小林一雄
Periodical title: Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue: 41(3) 1997.03
Volume: 41
Issue: 3
Pages: 82～85
Publication date of volume/issue (W3CDTF): 1997-03
ISSN (Periodical Title): 0914-2703
ISSN-L (Periodical Title): 0914-2703
Publication (Periodical Title): 東京 : 砥粒加工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN11
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1147
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4149993
http://id.ndl.go.jp/bib/4149993
Bibliographic Record Category (NDL): 632