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微小運動システムのダイナミクス評価 (特集 マイクロ機構の測定・評価技術)

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微小運動システムのダイナミクス評価(特集 マイクロ機構の測定・評価技術)

Call No. (NDL)
Z16-466
Bibliographic ID of National Diet Library
4160108
Material type
記事
Author
板生 清
Publisher
東京 : 精密工学会
Publication date
1997-03
Material Format
Paper
Journal name
精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編 63(3) 1997.03
Publication Page
p.317~322
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Paper Digital

Material Type
記事
Author/Editor
板生 清
Author Heading
Periodical title
精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
No. or year of volume/issue
63(3) 1997.03
Volume
63
Issue
3
Pages
317~322