レーザ光の振動走査方式による表面粗さ測定法の開発(第1報)平坦表面粗さの測定

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 63(3) 1997.03

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Material Type: 記事
Title: レーザ光の振動走査方式による表面粗さ測定法の開発(第1報)平坦表面粗さの測定
Author/Editor: 久岡基良
Author Heading: 久岡基良
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 63(3) 1997.03
Volume: 63
Issue: 3
Pages: 410～414
Publication date of volume/issue (W3CDTF): 1997-03
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4160128
http://id.ndl.go.jp/bib/4160128
Bibliographic Record Category (NDL): 632