半導体量子細線作成のための電子線レジストの特性評価

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Material Type: 記事
Title: 半導体量子細線作成のための電子線レジストの特性評価
Author/Editor: 堀部卓郎
森本弘
藤田安彦
Author Heading: 堀部卓郎
森本弘
藤田安彦
Periodical title: 東京都立科学技術大学紀要 / 東京都立科学技術大学編
No. or year of volume/issue: (通号 10) 1996.12
Sequential issue number: 10
Pages: 65～70
Publication date of volume/issue (W3CDTF): 1996-12
ISSN (Periodical Title): 1340-3176
ISSN-L (Periodical Title): 1340-3176
Publication (Periodical Title): 日野 : 東京都立科学技術大学学術研究委員会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM1
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-1428
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4160467
http://id.ndl.go.jp/bib/4160467
Bibliographic Record Category (NDL): 632