希ガスエキシマ励起を...

希ガスエキシマ励起を目的とした無声放電の電気的特性

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希ガスエキシマ励起を目的とした無声放電の電気的特性

Call No. (NDL)
Z16-793
Bibliographic ID of National Diet Library
4171854
Material type
記事
Author
住 洋夫ほか
Publisher
東京 : 電気学会
Publication date
1997-03
Material Format
Paper
Journal name
電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials 117(4) 1997.03
Publication Page
p.419~425
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Paper Digital

Material Type
記事
Author/Editor
住 洋夫
後久 真輝
行村 建
Periodical title
電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
No. or year of volume/issue
117(4) 1997.03
Volume
117
Issue
4
Pages
419~425
Publication date of volume/issue (W3CDTF)
1997-03