イオンビームアシスト蒸着法による窒化ケイ素薄膜の作製とその特性 (特集 窒化ケイ素の動向)
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- Material Type
- 記事
- Author/Editor
- 馬場 恒明
- Series Title
- Author Heading
- Periodical title
- ニューセラミックス / ティー・アイ・シィー [編]
- No. or year of volume/issue
- 10(4) 1997.04
- Volume
- 10
- Issue
- 4
- Pages
- 27～31