A New Pulsed Laser Deposition Method Using an Aperture Plate

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A New Pulsed Laser Deposition Method Using an Aperture Plate

Call No. (NDL)
Z53-A375
Bibliographic ID of National Diet Library
4176225
Material type
記事
Author
Narumi Inoueほか
Publisher
Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Publication date
1997-02
Material Format
Digital
Journal name
Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 36(2) 1997.02
Publication Page
p.704~709
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Detailed bibliographic record

Summary, etc.:

A new off-axis pulsed laser deposition method using an aperture plate is proposed for the purpose of depositing high surface-quality Ta<SUB>2</SUB>O<S...

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Bibliographic Record

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Digital

Material Type
記事
Author/Editor
Narumi Inoue
Tatsuya Ozaki
Toshiaki Monnaka 他
Periodical title
Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue
36(2) 1997.02
Volume
36
Issue
2
Pages
704~709
Publication date of volume/issue (W3CDTF)
1997-02